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Pregled bibliografske jedinice broj: 1454

Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization

Sassella, Adele; Borghesi, Alessandro; Pivac, Branko
Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization // Progress in Fourier Transform Spectroscopy : proceedings of the 10th International Conference / Mink, János ; Keresztury, Gábor ; Kellner, Robert (ur.).
Beč: Springer, 1997. str. 343-344 doi:10.1007/978-3-7091-6840-0_77 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)

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Naslov
Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization

Autori
Sassella, Adele ; Borghesi, Alessandro ; Pivac, Branko

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
Progress in Fourier Transform Spectroscopy : proceedings of the 10th International Conference / Mink, János ; Keresztury, Gábor ; Kellner, Robert - Beč : Springer, 1997, 343-344

ISBN
978-3-7091-6840-0

Skup
10th International Conference on Fourier Transform Spectroscopy (ICOFTS)

Mjesto i datum
Budimpešta, Mađarska, 27.08.1995. - 01.09.1995

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
thin films ; infrared characterization ; thickness measuremen

Sažetak
The results of transmission measurements of SiO2 films in silicon performed in the standard experimental configuration and in a new cross- sectional configurat dagger ion have bran compared. The cross-sectional measurements proved to be the most suitable for characterization of very thin (few nanometres thick) films and in addition are very sensitive.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA

Projekti:
00980301

Ustanove:
Institut "Ruđer Bošković", Zagreb

Profili:

Avatar Url Branko Pivac (autor)

Poveznice na cjeloviti tekst rada:

doi link.springer.com

Citiraj ovu publikaciju:

Sassella, Adele; Borghesi, Alessandro; Pivac, Branko
Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization // Progress in Fourier Transform Spectroscopy : proceedings of the 10th International Conference / Mink, János ; Keresztury, Gábor ; Kellner, Robert (ur.).
Beč: Springer, 1997. str. 343-344 doi:10.1007/978-3-7091-6840-0_77 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
Sassella, A., Borghesi, A. & Pivac, B. (1997) Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization. U: Mink, J., Keresztury, G. & Kellner, R. (ur.)Progress in Fourier Transform Spectroscopy : proceedings of the 10th International Conference doi:10.1007/978-3-7091-6840-0_77.
@article{article, author = {Sassella, Adele and Borghesi, Alessandro and Pivac, Branko}, year = {1997}, pages = {343-344}, DOI = {10.1007/978-3-7091-6840-0\_77}, keywords = {thin films, infrared characterization, thickness measuremen}, doi = {10.1007/978-3-7091-6840-0\_77}, isbn = {978-3-7091-6840-0}, title = {Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization}, keyword = {thin films, infrared characterization, thickness measuremen}, publisher = {Springer}, publisherplace = {Budimpe\v{s}ta, Ma\djarska} }
@article{article, author = {Sassella, Adele and Borghesi, Alessandro and Pivac, Branko}, year = {1997}, pages = {343-344}, DOI = {10.1007/978-3-7091-6840-0\_77}, keywords = {thin films, infrared characterization, thickness measuremen}, doi = {10.1007/978-3-7091-6840-0\_77}, isbn = {978-3-7091-6840-0}, title = {Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization}, keyword = {thin films, infrared characterization, thickness measuremen}, publisher = {Springer}, publisherplace = {Budimpe\v{s}ta, Ma\djarska} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
    • Conference Proceedings Citation Index - Science (CPCI-S)
  • Scopus

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