Naslov
OPTIČNI EMISIJSKI SPEKTRI RF KISIKOVE PLAZME
(OPTICAL EMISSION SPECTRA OF RF OXYGEN PLASMA)

Autori
Krstulović, Nikša ; Labazan, Irena ; Milošević, Slobodan ; Cvelbar, Uroš ; Vesel, Alenka ; Mozetič, Miran

Izvornik
Materiali in tehnologije (1580-2949) 38 (2004), 1-2; 51-54

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
plazma; kisik; optična emisijska spektroskopija
(plasma; oxygen; optical emission spectroscopy)

Sažetak
Optical emission from an inductively coupled RF oxygen plasma has been measured with a 60 cm optical emission spectrometer MDR23-Lomo. Plasma was generated within a glass tube (internal diameter of 36mm) with an RF generator at the frequency of 13, 56 MHz and the output power of 120 W. The tube was pumped with a roots/rotational pump. At the pressure of 20 Pa the optical spectrum (400-800nm) consisted of several lines characteristic for highly excited molecular and atomic states with the potential energy around 15 eV. The highest peak at 777, 4 nm corresponds to atomic transition 3p5P  3s5S. Molecular spectra correspond to transitions in the first negative system of O2+ ions were also found. Since the electron distribution function was quasi-Maxwellian with the electron temperature of 5 eV, the direct excitation of the observed radiative states was hardly possible. The spectra were interpreted with multistage processes.

Izvorni jezik
Slv

Znanstvena područja
Fizika

POVEZANOST RADA