Naslov
Sputter-deposited amorphous-like tungsten

Autori
Radić, Nikola ; Tonejc, Antun ; Ivkov, Jovica ; Dubček, Pavo ; Bernstorff, Sigrid ; Medunić, Zvonko

Izvornik
Surface and Coatings Technology (0257-8972) 180-181 C (2004); 66-70

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
magnetron sputtering; tungsten; amorphous phase

Sažetak
Thin tungsten films were prepared by sputtering of pure tungsten in a cylindrical magnetron device. The XRD-patterns of tungsten films deposited at 3.5 Pa argon pressure regularly exhibited only a very broad signal centered at 2q ť 40° - a distinctive mark of amorphous metals and alloys. The grain size of such amorphous-like tungsten material was estimated to be about 2 nm, while SAXS measurements yield radius of gyration of 1, 4 nm. Its thermal coefficient of the electric resistivity at room temperature was negative - a characteristic feature of amorphous metals and alloys. Thermal stability of the amorphous-like tungsten films was investigated by isochronal heating up to 720°C in vacuum, with continuous monitoring of electric resistivity. The obtained results indicate that amorphous-like tungsten is thermally stable up to 450°C.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA