Naslov
The Influence of RF- power on Structure and Photocatalytic Properties of thin PEALD ZnO Films Deposited at Room Temperature

Autori
Jardas, Daria ; Peter, Robert ; Perčić, Marko ; Salamon, Krešimir ; Omerzu, Aleš ; Petravić, Mladen

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
The SICT/Plasma Tech/Tribology 2022 International Joint Conference : Conference Proceedings / - Barcelona : SETCOR, 2022, 35-39

Skup
The SICT/Plasma Tech/Tribology 2022 International Joint Conference

Mjesto i datum
Barcelona, Španjolska, 27.04.2022. - 29.04.2022

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
ZnO ; tanki filmovi ; plasmom pojačana depozicija atomskih slojeva ; RF snaga ; fotokataliza
(ZnO ; thin films ; plasma- enhanced atomic layer deposition ; RF power ; photocatalysis)

Sažetak
The photocatalytic activity of thin ZnO films deposited by plasma-enhanced atomic layer deposition at room temperature was investigated for different radio- frequency (RF) powers applied during synthesis. The films prepared with higher plasma power show higher photocatalytic activity. Structural and optical measurements were performed to determine the origin of their properties. All the films prepared were predominantly amorphous. However, the films prepared with higher plasma power show a more ordered structure.

Izvorni jezik
Engleski

Znanstvena područja
Fizika, Kemija, Interdisciplinarne prirodne znanosti

POVEZANOST RADA