Pregled bibliografske jedinice broj: 1143155
Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films
Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films // Chemical Communications, 57 (2021), 17; 2160-2163 doi:10.1039/d0cc07858a (međunarodna recenzija, članak, znanstveni)
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Naslov
Radical-triggered cross-linking for molecular
layer deposition of SiAlCOH hybrid thin films
Autori
Ashurbekova, Kristina ; Ashurbekova, Karina ; Saric, Iva ; Modin, Evgeny ; Petravic, Mladen ; Abdulagatov, Ilmutdin ; Abdulagatov, Aziz ; Knez, Mato
Izvornik
Chemical Communications (1359-7345) 57
(2021), 17;
2160-2163
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Molecular layer deposition, SiAlCOH, hybrid thin films
Sažetak
Here, we report on a simultaneous growth and radical-initiated cross-linking of a hybrid thin film in a layer-by-layer manner via molecular layer deposition (MLD). The cross linked film exhibited a self-limiting MLD growth behavior and improved properties like 12% higher film density and enhanced stability compared to the non-cross-linked film.
Izvorni jezik
Engleski
Znanstvena područja
Fizika, Kemija, Interdisciplinarne prirodne znanosti
POVEZANOST RADA
Ustanove:
Sveučilište u Rijeci - Odjel za fiziku
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
- MEDLINE
- Nature Index
