Pregled bibliografske jedinice broj: 1130798
Methodological correlation of finite element models to nanoindentation measurements on Si (100)
Methodological correlation of finite element models to nanoindentation measurements on Si (100) // Proceedings of the 21th International Conference of the European Society for Precision Engineering and Nanotechnology / Leach, R. K. ; Nisbet, C. Philips, D. (ur.).
online: European Society for Precision Engineering and Nanotechnology (EUSPEN), 2021. str. 105-108 (plenarno, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
CROSBI ID: 1130798 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Methodological correlation of finite element models
to nanoindentation measurements on Si (100)
Autori
Srnec Novak, Jelena ; Kamenar, Ervin ; Zelenika, Saša ; De Bona, Francesco, Piovesana, Laura
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 21th International Conference of the European Society for Precision Engineering and Nanotechnology
/ Leach, R. K. ; Nisbet, C. Philips, D. - : European Society for Precision Engineering and Nanotechnology (EUSPEN), 2021, 105-108
ISBN
978-0-9957751-9-0
Skup
21th International Conference of the European Society for Precision Engineering and Nanotechnology
Mjesto i datum
Online, 07.06.2021. - 11.06.2021
Vrsta sudjelovanja
Plenarno
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
nanoindentation ; FEA numerical calculations ; elasto-plastic material model ; correlation methodology ; MEMS and NEMS
Sažetak
A viable approach to obtain mechanical properties such as Young’s modulus and hardness, is testing on a nanoindentation device. Such an experimental procedure can, however, be time-consuming and expensive. Finite element analysis (FEA) can be employed to minimize the number of required measurements, i.e., to obtain numerically the load vs. indentation depth curves for varying input parameters, hence extracting the resulting elasto-plastic material properties. A methodological approach is used in this work to correlate the responses obtained via FEA to nanoindentation experimental data. A (100)- oriented single crystal silicon wafer is used as a testing sample. Numerical simulations are performed by employing a bilinear elasto-plastic material model. A sensitivity analysis of the characteristic parameters of the material model is then conducted on the numerically obtained load vs. displacement curves. The proposed methodology enables replicating the experimental curves with estimated errors lower than 1 % and 15 % for Young’s modulus and hardness, respectively. The performed analyses allow establishing also that, when evaluating numerically hardness, the tip radius and shape significantly affect the accuracy of the results, especially for lower indentation depths.
Izvorni jezik
Engleski
Znanstvena područja
Strojarstvo, Temeljne tehničke znanosti
POVEZANOST RADA
Projekti:
NadSve-uniri-tehnic-18-32 - Inovativne mehatroničke konstrukcije za pametna tehnološka rješenja (Zelenika, Saša, NadSve - Natječaj za dodjelu sredstava potpore znanstvenim istraživanjima na Sveučilištu u Rijeci za 2018. godinu - projekti iskusnih znanstvenika i umjetnika) ( CroRIS)
NadSve-Sveučilište u Rijeci-uniri-mladi-tehnic-20-18 - Razvoj naprednih metoda za procijenu elasto-plastičnog ponašanja materijala temeljen na nanoindentacijskim podacima (RNMZPEPPMTNNP) (Srnec Novak, Jelena, NadSve - UNIRI PROJEKTI MLADIH ZNANSTVENIKA I UMJETNIKA) ( CroRIS)
Ustanove:
Tehnički fakultet, Rijeka,
Sveučilište u Rijeci
