engleski

Zinc oxide thin films doped with aluminium

The influence of preparation procedure on the morphological properties of the ZnO thin films doped by aluminium was studied. The ZnO and Al doped ZnO (AZO) films were prepared on glass substrates by sol-gel method using zinc sol doped with 1, 2, or 3 at % of Al with respect to Zn. The films were spin coated layer by layer, and samples with 1, 5, 10 layers were studied in details. To obtain crystallinity, the films were annealed at different temperatures and different heating rates to investigate the influence of the annealing process on the morphological properties. For the morphological and structural characterization scanning electron microscopy (SEM) techniques, grazing incidence X-ray diffraction (GIXRD) and Raman spectroscopy were used. For the optical characterization UV/Vis spectroscopy measurements of transmittance were performed. It was observed that the morphology and optical properties of the AZO films can be tailored by varing the temperature applied between deposition of the layersand temperature of post annealing temperature. Therfore, the sol-gel procedure combined with heat and annealing treatment was shown as an easy, fast and low-cost method for preparation of AZO films with desired properties

zinc oxide ; spin coating ; thin films ; SEM

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