Indirect optical crosstalk reduction by highly- doped backside layer in single-photon avalanche diode arrays (CROSBI ID 252387)
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Podaci o odgovornosti
Osrečki, Željko ; Knežević, Tihomir ; Nanver, Lis K. ; Suligoj, Tomislav
engleski
Indirect optical crosstalk reduction by highly- doped backside layer in single-photon avalanche diode arrays
A method of reducing indirect optical crosstalk in single-photon avalanche diode arrays is investigated by TCAD simulations. The reduction is accomplished by taking advantage of an enhanced optical absorption in a highly-doped Si layer on the backside of the wafer. A simulation environment was developed to give information about optical crosstalk by incorporating the experimental optical constants of the materials constituting the crosstalk-reduction layer. It is shown that the indirect optical crosstalk is greatly reduced by increasing the thickness and doping of the layer. A crosstalk reduction of 5 orders of magnitude is gained with addition of 1-μm-thick PureB/a-Si stack for the array processed on a p-type substrate, while the same reduction is achieved with a 1-μm-thick highly-doped Si layer (As, 1.1x10^(20) cm^(-3)) for an array processed on an n-type substrate.
Single-photon avalanche diode (SPAD) ; SPAD array ; Indirect optical crosstalk ; PureB
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Podaci o izdanju
50 (3)
2018.
152
13
objavljeno
0306-8919
1572-817X
10.1007/s11082-018-1415-2