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Electrothermal MEMS Resonators with Piezoelectric Sensing for Tunable Filtering Applications

In this work, electrothermally actuated and piezoelectrically sensed MEMS resonators have been fabricated with three different resonant structures: single-clamped beam [5], double-clamped beam [4] and diaphragm [6] (Fig 1). Electrical characterization of the devices has been performed by measuring the two-port transmission frequency response. The devices operate between 0.5 and 1.5 MHz and Q- factors up to 400 have been measured in atmospheric conditions. The frequency tuning range of about 350, 000 ppm has been achieved by applying DC bias voltage of 7 V. Details on devices’ design, materials, fabrication process and testing procedure will be presented. The measurements results obtained by testing the fabricated devices will be discussed along with the influence of the electrothermal actuator and piezoelectric sensor designs on frequency shift and Q-factor.

MEMS resonator ; Tunable filter ; Electrothermal actuation ; Piezoelectric sensing

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