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Tunability of Piezoelectric MEMS Ring Resonator Based Filter (CROSBI ID 237920)

Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija

Sviličić, Boris ; Wood, Graham ; Mastropaolo, Enrico ; Cheung, Rebecca Tunability of Piezoelectric MEMS Ring Resonator Based Filter // Procedia engineering, 168 (2016), 1517-1520. doi: 10.1016/j.proeng.2016.11.450

Podaci o odgovornosti

Sviličić, Boris ; Wood, Graham ; Mastropaolo, Enrico ; Cheung, Rebecca

engleski

Tunability of Piezoelectric MEMS Ring Resonator Based Filter

The influence of piezoelectric actuator design on a two-port piezoelectrically transduced micro-electro-mechanical (MEMS) ring resonator frequency tuning performance has been investigated. A cubic silicon carbide (3C-SiC) ring resonator was fabricated with a lead–zirconium–titanate (PZT) piezoelectric actuator and sensor integrated on the surface of the ring. Measurements of the transmission frequency response have shown that the device with the ring diameter of 260 m resonates at 1.082 MHz and a frequency tuning range of about 3, 200 ppm has been achieved by applying DC bias voltage in the range 0 V – 6 V. Experimental results have shown that, under the same operating conditions, a wider frequency tuning range has been detected when the device was actuated and tuned with the piezoelectric actuator that covers a larger area of the ring surface and surrounds the central hole of the ring resonant structure.

MEMS resonator, Tunable filter, Piezoelectric actuation, Piezoelectric sensing

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Podaci o izdanju

168

2016.

1517-1520

objavljeno

1877-7058

10.1016/j.proeng.2016.11.450

Povezanost rada

nije evidentirano

Poveznice