engleski

Generation of quasi-band EUV radiation by ablative capillary discharges

Generation of narrow-band or line radiation in the EUV spectral region with radiation outside the band in question as low as possible is of great interest for technological applications. First results of a systematic study of the performance of an ablative capillary discharge made of PVC are presented and discussed. It is shown that the band of radiation is produced by transition arrays of multiply ionized heavy metal ions (Sn, Zn, etc.) that are constituents of various chemical additives in commercial PVC grades. A low concentration of radiating ions, good thermalization of the capillary plasma and homogeneity along the capillary produce better defined bands with less line radiation outside the band in comparison to laser-produced plasma sources using such ions. Two interesting cases are described with a band width of around 1 nm and maxima near 10 and 13.5 nm, respectively. Both are capable of producing several mJ/sr/pulse of radiation in the respective radiation band.

Ablative capillary discharge; EUV radiation source

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