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Thermo optical coefficient of tin-oxide films measured by ellipsometry


Ristić, Davor; Guddala, Sriram; Chiappini, Andrea; Alombert Goget, Guillaume; Lukowiak, Anna; Ramponi, Roberta; Righini, Giancarlo Cesare; Ivanda, Mile; Ferrari, Maurizio
Thermo optical coefficient of tin-oxide films measured by ellipsometry // Journal of applied physics, 118 (2015), 215306-1 doi:10.1063/1.4937146 (međunarodna recenzija, članak, znanstveni)


Naslov
Thermo optical coefficient of tin-oxide films measured by ellipsometry

Autori
Ristić, Davor ; Guddala, Sriram ; Chiappini, Andrea ; Alombert Goget, Guillaume ; Lukowiak, Anna ; Ramponi, Roberta ; Righini, Giancarlo Cesare ; Ivanda, Mile ; Ferrari, Maurizio

Izvornik
Journal of applied physics (0021-8979) 118 (2015); 215306-1

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Silicon ; Refractive index ; Ellipsometry ; Silica ; Thin film structure
(Refractive index ; Ellipsometry ; Silica ; Thin film structure)

Sažetak
The thermo-optic coefficient of tin-oxide thin films on silicon substrates was measured using fixed wavelength ellipsometry. The applicability of ellipsometry for these measurements is discussed with special considerations to the problem of measurement of the thermo-optic coefficient of materials with very low values of the thermo-optic coefficient (<2 × 10−5). The effect of thermal annealing on the thermo-optic coefficient and on the film-substrate boundary properties of the tin oxide film is also discussed.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
HRZZ-IP-2014-09-7046 - Hibriridne silicijske nanstrukture za senzorik (Mile Ivanda, )

Ustanove
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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