engleski

Nano-calibration standard with multiple pitch and step height values

In 2011 Croatian National Laboratory for Length (HMI/FSB-LPMD) developed calibration standards which have been physically implemented in cooperation with the company MikroMasch Trading OU and the Ruđer Bošković Institute. Specific design of standards makes them suitable for calibration of optical instruments, stylus instruments, scanning electron microscopes, atomic force microscopes and scanning tunnelling microscopes. Therefore, the developed calibration standards greatly contribute to the reproducibility of measurement results for groove depth well as the 2D and 3D roughness parameters obtained by various measuring methods. After a number of measurements conducted on developed standards, based on which new knowledge was acquired, HMI/FSB-LPMD designed a new standard for the field of dimensional nanometrology. This paper presents the design of a new standard that is still suitable for calibration of different types of measuring instruments, i.e. methods, but has a larger measurement capability in terms of measuring ranges in vertical and lateral direction.

nanometrology; calibration standards; reproducibility

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