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Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy


Krstulović, Nikša; Salamon, Krešimir; Modić, Martina; Bišćan, Marijan; Milat, Ognjen; Milošević, Slobodan
Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy // Spectrochimica acta. Part B, Atomic spectroscopy, 107 (2015), 67-74 doi:10.1016/j.sab.2015.02.008 (međunarodna recenzija, članak, znanstveni)


Naslov
Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy

Autori
Krstulović, Nikša ; Salamon, Krešimir ; Modić, Martina ; Bišćan, Marijan ; Milat, Ognjen ; Milošević, Slobodan

Izvornik
Spectrochimica acta. Part B, Atomic spectroscopy (0584-8547) 107 (2015); 67-74

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Laser produced plasma ; Laser plasma dynamics ; Double-pulse laser ablation ; Pulsed laser deposition ; Thin film surface morphology

Sažetak
In this paper, dynamics of double-pulse laser produced titanium plasma was studied both directly using optical emission spectroscopy (OES) and indirectly from morphological properties of deposited thin films. Both approaches yield consistent results. Ablated material was deposited in a form of thin film on the Si substrate. During deposition, plasma dynamics was monitored using optical emission spectroscopy with spatial and temporal resolutions. The influence of ablation mode (single and double) and delay time τ (delay between first and second pulses in double-pulse mode) on plasma dynamics and consequently on morphology of deposited Ti- films was studied using X-ray reflectivity and atomic force microscopy. Delay time τ was varied from 170 ns to 4 μs. The results show strong dependence of both emission signal and Ti-film properties, such as thickness, density and roughness, on τ. In addition, correlation of average density and thickness of film is observed. These results are discussed in terms of dependency of angular distribution and kinetic energy of plasma plume particles on τ. Advantages of using double- pulse laser deposition for possible application in thin film production are shown.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
035-0352843-2844 - Veza strukturnih i fizikalnih svojstava materijala kontrolirane dimenzionalnosti (Ognjen Milat, )
HRZZ-IP-2013-11-2753 - Dijagnostika Interakcije lasera i hladne plazme (Slobodan Milošević, )

Ustanove
Institut za fiziku, Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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