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Piezoelectric Micro and Nano Structures and their Applications

We present recently granted project entitled as “Capacity building and technology transfer of micro-electromechanical systems at the University of Split” (MEMSplit). The project, financed by the European Union structural fund, brings together research and technological potentials of the public university and Institute of Nuclear technology (INETEC), SME specialized in nuclear power plant inspection and repair services. The official starting date of the project is planned in autumn 2014. As a result of the project implementation, research capacities of the University of Split will be empowered by R&D and manufacturing potentials in MEMS technology. Demonstration of the operability of developed processes includes building of two functional MEMS models: microprobe with surface acoustic wave detection of organic materials, and miniature medical ultrasound transducer for dermatological tests, which will serve as quantitative indicators of the technical part of the project. Dissemination of project activities will be targeted towards Croatian companies that have potentials in application of MEMS technology, and scientific community as well, with a goal of networking and gaining the potentials of further joint grant application. Ultimately, the project implementation will strengthen the Technology Transfer Office of the University of Split for the transfer of MEMS technology to the economy, both at the local and national level.

Micro and nanostructures; lithography; evaporation; sputtering; sensor

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