Electronic Structure of Two Precursors for Nanofabrication:[(CH3)3CN]2W[N(CH3)2]2 and Ti(NMe2)2(NEt2)2 (CROSBI ID 207753)
Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Novak, Igor ; Kovač, Branka ; Jokić, Milan
engleski
Electronic Structure of Two Precursors for Nanofabrication:[(CH3)3CN]2W[N(CH3)2]2 and Ti(NMe2)2(NEt2)2
The electronic structures of bis(tert-butylimino) bis(dimethylamino) tungsten and bis(N-ethylethanaminato)bis(N-methylmethanaminato) titanium heteroleptic complexes, which are precursors for atomic layer deposition of metallic nitride on surfaces, have been investigated by HeI and HeII UV photoelectron spectroscopy and DFT/OVGF calculations. We discuss the electronic structures of these two and other related d0-type complexes in relation to the mechanism of adsorption and decomposition of metal alkylamide precursors on surfaces.
UV photoelectron spectroscopy; W and Ti heteroleptic complexes; atomic layer deposition; electronic structure; DFT-OVGF calculations
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Podaci o izdanju
118 (30)
2014.
5636-5641
objavljeno
1089-5639
10.1021/jp505365n