Long term stability of silicon roughness standards (CROSBI ID 612090)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Baršić, Gorana ; Mahović, Sanjin ; Katić, Marko Šimunović, Vedran
engleski
Long term stability of silicon roughness standards
In 1986 first roughness reference standards made of silicon were produced at the Laboratory for precise measurements of length (LFSB), which is now a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD. Until then, roughness standards were made either from steel or glass. Due to world-class quality of these standards and their outstanding metrological characteristics, they were used in several European countries ; among others, standards are currently being used as roughness reference standards in Italy, Slovenia and Croatia. After 27 years of use, we decided to conduct a research of metrological features on two silicon roughness standards, used as primary standards for roughness in Croatia.
silicon roughness standards; long term stability
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Podaci o prilogu
2014.
objavljeno
Podaci o matičnoj publikaciji
14th International Conference of the European Society for Precision Engineering & Nanotechnology, Dubrovnik, Croatia, 2014.
Podaci o skupu
euspen 14th International Conference
poster
02.06.2014-06.06.2014
Dubrovnik, Hrvatska