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Long term stability of silicon roughness standards (CROSBI ID 612090)

Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija

Baršić, Gorana ; Mahović, Sanjin ; Katić, Marko Šimunović, Vedran Long term stability of silicon roughness standards // 14th International Conference of the European Society for Precision Engineering & Nanotechnology, Dubrovnik, Croatia, 2014.. 2014

Podaci o odgovornosti

Baršić, Gorana ; Mahović, Sanjin ; Katić, Marko Šimunović, Vedran

engleski

Long term stability of silicon roughness standards

In 1986 first roughness reference standards made of silicon were produced at the Laboratory for precise measurements of length (LFSB), which is now a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD. Until then, roughness standards were made either from steel or glass. Due to world-class quality of these standards and their outstanding metrological characteristics, they were used in several European countries ; among others, standards are currently being used as roughness reference standards in Italy, Slovenia and Croatia. After 27 years of use, we decided to conduct a research of metrological features on two silicon roughness standards, used as primary standards for roughness in Croatia.

silicon roughness standards; long term stability

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Podaci o prilogu

2014.

objavljeno

Podaci o matičnoj publikaciji

14th International Conference of the European Society for Precision Engineering & Nanotechnology, Dubrovnik, Croatia, 2014.

Podaci o skupu

euspen 14th International Conference

poster

02.06.2014-06.06.2014

Dubrovnik, Hrvatska

Povezanost rada

Strojarstvo