engleski

Grazing incidence small angle x ray scattering-GISAXS

Grazing incidence small angle x ray scattering-GISAXS is versatile technique for structural characterization of nanostructured surfaces and thin films. GISAXS provides data about size, shape and arrangement of nano-objects on the surfaces or in the films, together with their statistical distributions. The technique is non-destructive and the obtained data have excellent statistics. However, the GISAXS measure a reciprocal-space distribution of the scattered intensity and the retrieval of real space information is not a trivial task. Usually, one has to use a suitable structure model, from which the reciprocal-space distribution of the scattered intensity is simulated and compared to experimental data. The basics of the GISAXS technique, as well as its application on the analysis of various systems will be presented. The measurement method and extracting of the structural parameters from the measured intensity distributions using modeling will be described. The GISAXS is especially suitable for the analysis of ordered arrays of nano-objects like lattices of nanoparticles or quantum dots. In such systems the correlations in the nanoparticle positions can be easily observed and statistically described. Therefore, the special attention will be paid to the application of GISAXS on structural analysis of three-dimensional nanoparticle lattices.

GISAXS

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