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Comparative study of direct and indirect, image -based profilometry in characterization of surface roughness

In this study we have investigated and compared two different approaches to characterization of surface structure and roughness. The results of the stylus profilometric method are compared with results obtained with application of relatively novel - indirect, image based profilometry. The aim was to evaluate the performance and practical usefulness of the indirect method in characterization of a surface topography. The indirect approach involved use of the Gwyddion software for analysis of Scanning Electron Microscope (SEM) images and calculation of standard profilometric parameters. It is well known that the SEM micrographs provide an excellent tool for visualization and qualitative description of the surface topography including estimation of corresponding fractal dimension. The results of this study demonstrate that it is also possible to obtain profilometric parameters from analysis of SEM micrographs with appropriately calibrated grey scale intensity distribution, and that the values of the parameters are comparable to those obtained by classical (stylus) profilometry. Better agreement with results of the direct profilometric method was achieved for parameters related to heights distribution than those related to distribution of depths. Regarding these differences, we have provided arguments indicating that the values of these depths - related parameters obtained by indirect profilometry are closer to the "true" values than those inferred from the direct profilometry. Generally, the results of this comparative study indicate that the indirect image-based profilometry is valuable and efficient tool in characterization of various surface's topographies.

profilometry; surface roughness; surface topography; SEM micrograph; printing plate; aluminium oxide

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