IR-Based Temperature Measurement in Rotational Grinding of Sapphire Wafers (CROSBI ID 578593)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Klocke, F. ; Kuljanić, Elso ; Dambon, O. ; Sortino, M. ; Herben, M. ; Totis, G.
engleski
IR-Based Temperature Measurement in Rotational Grinding of Sapphire Wafers
Single crystalline sapphire wafers are used as a substrate for semiconductor applications like gallium nitride-based white LEDs. In optimization of the manufacturing chain, rotational grinding can play a mayor role by substituting the conventional lapping process and reducing cost intensive efforts in downstream polishing steps. Due the material properties and in particular the hardness of sapphire, however, grinding process development is difficult. For this reason, the measurement of in-process variables like contact zone temperatures is of significant interest. In this paper, a concept and experimental setup for IR-based temperature measurement that utilizes the optical properties of sapphire is presented. The system behaviour of the realized test setup is examined in calibration tests. The results of successfully performed grinding tests are presented to prove the feasibility of the measuremnt concept.
Grinding; Temperature measurement; Sapphire
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Podaci o prilogu
623-634.
2011.
objavljeno
Podaci o matičnoj publikaciji
AMST'11 Advanced Manufacturing Systems and Technology
Kuljanić, Elso
Udine:
978-953-6326-64-8
Podaci o skupu
9th International Conference on Advanced Manufacturing Systems and Technology AMST'11
predavanje
16.06.2011-17.06.2011
Mali Lošinj, Hrvatska