engleski

Optical characterization and reverse engineering based on multiangle spectroscopy

We perform characterization of thin films and reverse engineering of multilayer coatings on the basis of multiangle spectral photometric data provided by a new advanced spectrophotometer accessory. Experimental samples of single thin films and multilayer coatings are produced by magnetron sputtering and e-beam evaporation. Reflectance and transmittance data at two polarization states are measured at the incidence angles from 7 to 40 degrees. We demonstrate that multiangle reflectance and transmittance data provide reliable characterization and reverse engineering results.

multiangle spectroscopy ; optical characterization

nije evidentirano