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Pregled bibliografske jedinice broj: 531096

Low-temperature fabrication of layered selforganized Ge clusters by RF-sputtering


Pinto, Sara R.C.; Rolo, Anabela G.; Buljan, Maja; Chahboun, Adil; Bernstorff, Sigrid; Barradas, Nuno P.; Alves, Eduardo; Kashtiban, Reza J.; Bangert, Ursel; Gomes, Maria J.M.
Low-temperature fabrication of layered selforganized Ge clusters by RF-sputtering // Nanoscale Research Letters, 6 (2011), 341-1 doi:10.1186/1556-276X-6-341 (međunarodna recenzija, članak, znanstveni)


Naslov
Low-temperature fabrication of layered selforganized Ge clusters by RF-sputtering

Autori
Pinto, Sara R.C. ; Rolo, Anabela G. ; Buljan, Maja ; Chahboun, Adil ; Bernstorff, Sigrid ; Barradas, Nuno P. ; Alves, Eduardo ; Kashtiban, Reza J. ; Bangert, Ursel ; Gomes, Maria J.M.

Izvornik
Nanoscale Research Letters (1931-7573) 6 (2011); 341-1

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Self-organized; Ge; GISAXS; magnetron sputtering

Sažetak
In this article, we present an investigation of (Ge + SiO2)/SiO2 multilayers deposited by magnetron sputtering and subsequently annealed at different temperatures. The structural properties were investigated by transmission electron microscopy, grazing incidence small angles X-ray scattering, Rutherford backscattering spectrometry, Raman, and X-ray photoelectron spectroscopies. We show a formation of self-assembled Ge clusters during the deposition at 250°C. The clusters are ordered in a three-dimensional lattice, and they have very small sizes (about 3 nm) and narrow size distribution. The crystallization of the clusters was achieved at annealing temperature of 700°C.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
098-0982886-2866 - Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima (Branko Pivac, )

Ustanove
Institut "Ruđer Bošković", Zagreb

Autor s matičnim brojem:
Maja Buljan, (242416)

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


Uključenost u ostale bibliografske baze podataka:


  • AGRICOLA


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