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Optical Emission From Oxygen Plasma in E and H Modes


Kregar, Zlatko; Milošević, Slobodan; Vesel, Alenka
Optical Emission From Oxygen Plasma in E and H Modes // Ieee transactions on plasma science, 39 (2011), 11; 2502-2503 doi:10.1109/TPS.2011.2160733 (međunarodna recenzija, kratko priopcenje, znanstveni)


Naslov
Optical Emission From Oxygen Plasma in E and H Modes

Autori
Kregar, Zlatko ; Milošević, Slobodan ; Vesel, Alenka

Izvornik
Ieee transactions on plasma science (0093-3813) 39 (2011), 11; 2502-2503

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, kratko priopcenje, znanstveni

Ključne riječi
Optical emission; oxygen plasma; plasma modes

Sažetak
Highly reactive oxygen plasma with a very high dissociation fraction of oxygen molecules is often created in electrodeless discharges. The discharge runs either in the E or H mode. The E mode is obtained at low power while the H mode dominates at high power. The transition between two modes is easily observed by the naked eye or, even better, by optical emission spectroscopy. In this paper, we show major differences between the two modes obtained in an experimental plasma reactor with a 1200-W RF generator operating at the frequency of 13.56 MHz.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Slobodan Milošević, )

Ustanove
Institut za fiziku, Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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