engleski

Characterization of oxygen plasma created in RF discharge by optical emission spectroscopy

Optical emission spectroscopy was applied to study characteristics of oxygen plasma created in an electrode-less radio frequency discharge. Plasma was created by an RF generator with the nominal power up to 1000 W and the frequency of 13.56 MHz. Optical spectra were detected with a low – resolution spectrometer Avantes 3648. The spectral features of particular interest were neutral oxygen atomic lines, neutral oxygen molecular as well as positively charged molecular bands. The spectral features obtained in the H discharge mode were over 2 orders of magnitude more intense than in the E mode. Important differences in the intensity of various spectral features were observed also at different pressures. The results allowed for qualitative interpretation of plasma characteristics.

Optical emission spectroscopy; oxygen plasma

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