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Characterization of the cooling liquid after the machining of Si and SiO2

A synthetic liquid (5 % water solution) was used during the coarse and fine grinding of single- crystal Si and fused SiO2. In order to characterize the synthetic liquid, its physical and chemical properties, corrosion protection, foaming, coolant and lubricant properties were determined. These parameters were determined before machining and after coarse and fine grinding. The liquid contains particles of the treated material after coarse and fine grinding. Therefore, the particle size distribution was determined in order to select a method for removing solid particles before the liquid is reused. Results of investigation indicated that the physical and chemical properties of the used synthetic liquid did not change after machining, which means that the liquid can be reused after an adequate solid-liquid separation method has been applied.

synthetic liquid ; coarse and fine grinding ; single-crystal Si ; fused SiO2

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