Modeling study on carrier mobility in ultra-thin body FinFETs with circuit-level implications (CROSBI ID 566034)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Poljak, Mirko ; Jovanović, Vladimir ; Suligoj, Tomislav
engleski
Modeling study on carrier mobility in ultra-thin body FinFETs with circuit-level implications
Influence of different active surface orientations and fin-width scaling on electron and hole mobility in ultra-thin body FinFETs is examined. Results of mobility modeling are validated on experimental data, including (111)-oriented FinFETs from our previous work which are here proven to exhibit no mobility degradation caused by fin-width fluctuations. We show that (111)-oriented FinFETs are the optimum solution when performance and layout area of 6T SRAM cell are concerned, since they enable SRAM with a minimum number of fins per cell.
ultra-thin body; FinFET; electron mobility; hole mobility; quantum confinement; physics-based modeling; SRAM
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Podaci o prilogu
242-245.
2010.
objavljeno
Podaci o matičnoj publikaciji
Proceedings of the 40th European Solid-State Device Research Conference
Gamiz, Francisco ; Godoy, Andres
Sevilla: Institute of Electrical and Electronics Engineers (IEEE)
978-1-4244-6659-7
1930-8876
Podaci o skupu
European Solid-State Device Research Conference
predavanje
14.09.2010-16.09.2010
Sevilla, Španjolska