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Time resolved spectroscopic characterization of a-C:H deposition by methane and removal by oxygen inductively coupled RF plasma


Bišćan, Marijan; Kregar, Zlatko; Krstulović, Nikša; Milošević, Slobodan
Time resolved spectroscopic characterization of a-C:H deposition by methane and removal by oxygen inductively coupled RF plasma // Plasma chemistry and plasma processing, 30 (2010), 3; 401-412 doi:10.1007/s11090-010-9226-7 (međunarodna recenzija, članak, znanstveni)


Naslov
Time resolved spectroscopic characterization of a-C:H deposition by methane and removal by oxygen inductively coupled RF plasma

Autori
Bišćan, Marijan ; Kregar, Zlatko ; Krstulović, Nikša ; Milošević, Slobodan

Izvornik
Plasma chemistry and plasma processing (0272-4324) 30 (2010), 3; 401-412

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Methane plasma; optical emission spectroscopy; amorphous hydrogenated carbon; oxygen plasma cleaning; plasma sterilization

Sažetak
The deposition of amorphous hydrogenated carbon thin films by inductively coupled radio frequency (IC RF) pure methane plasma and its subsequent removal by IC RF pure oxygen plasma have been studied within a cylindrical glass tube. Both processes were simultaneously monitored by optical emission spectroscopy, light transmission through thin film deposits, temperature of the discharge tube and total gas pressure measurements. Comparing the time evolution of all parameters, various stages of oxygen plasma cleaning process were established. The transitions between E-mode and H-mode of plasma induced by the presence of cleaning products impurities were observed and discussed.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Slobodan Milošević, )

Ustanove
Institut za fiziku, Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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