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Pregled bibliografske jedinice broj: 427868

GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films


Juraić, Krunoslav; Gracin, Davor; Šantić, Branko; Meljanac, Daniel; Zorić, Nedeljko; Gajović, Andreja; Dubček, Pavo; Bernstorf, Sigrid; Čeh, Miran
GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films // Nuclear instruments & methods in physics research. Section B : Beam interactions with materials and atoms, 268 (2010), 3-4; 259-262 doi:10.1016/j.nimb.2009.09.046 (međunarodna recenzija, članak, znanstveni)


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Naslov
GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films

Autori
Juraić, Krunoslav ; Gracin, Davor ; Šantić, Branko ; Meljanac, Daniel ; Zorić, Nedeljko ; Gajović, Andreja ; Dubček, Pavo ; Bernstorf, Sigrid ; Čeh, Miran

Izvornik
Nuclear instruments & methods in physics research. Section B : Beam interactions with materials and atoms (0168-583X) 268 (2010), 3-4; 259-262

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
amorphous-nanocrytalline silicon ; GISAXS ; WAXS

Sažetak
Amorphous-nanocrystalline silicon thin films were deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) on glass substrate with various silicon nanocrystal size distributions and volume fractions. The samples were examined by Grazing Incidence Small Angle X-ray Scattering (GISAXS) and Grazing Incidence Wide Angle X-ray Scattering (GIWAXS) at the Austrian SAXS beamline (Synchrotron Elettra, Trieste) using an X-ray beam energy of 8 keV. The grazing incidence angle varied from the critical angle to 0.2 deg. above the critical angle. This allowed the examination of the samples at different depths, and the distinction of the surface scattering contribution from the particles scattering in the bulk. The sizes of the “ particles” obtained from the horizontal and vertical sections of 2D GISAXS patterns were between 2 and 6 nanometers. Since GISAXS is sensitive to electron density differences (contrast) between the scattering bodies and the surrounding matrix, it is not evident whether the particles are nanocrystals or just voids embedded in amorphous matrix. However, the size of the crystals calculated from the line-shape analysis of peaks in GIWAXS spectra and the crystal size distribution obtained from High-Resolution Transmission Electron Microscopy (HRTEM) images agree well with the size of “ particles” estimated from GISAXS, strongly indicating that the observed particles are silicon nanocrystals.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekti:
098-0982886-2866 - Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima (Pivac, Branko, MZOS ) ( POIROT)
098-0982886-2894 - Tanki filmovi legura silicija na prijelazu iz amorfne u uređenu strukturu (Gracin, Davor, MZOS ) ( POIROT)
098-0982886-2895 - Novi amorfni i nanostrukturirani tankoslojni materijali (Radić, Nikola, MZOS ) ( POIROT)
098-0982886-2897 - Poluvodički materijali za optoelektroniku i nanotehnologiju (Šantić, Branko, MZOS ) ( POIROT)
098-0982904-2898 - Fizika i primjena nanostruktura i volumne tvari (Ivanda, Mile, MZOS ) ( POIROT)

Ustanove:
Institut "Ruđer Bošković", Zagreb

Citiraj ovu publikaciju

Juraić, Krunoslav; Gracin, Davor; Šantić, Branko; Meljanac, Daniel; Zorić, Nedeljko; Gajović, Andreja; Dubček, Pavo; Bernstorf, Sigrid; Čeh, Miran
GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films // Nuclear instruments & methods in physics research. Section B : Beam interactions with materials and atoms, 268 (2010), 3-4; 259-262 doi:10.1016/j.nimb.2009.09.046 (međunarodna recenzija, članak, znanstveni)
Juraić, K., Gracin, D., Šantić, B., Meljanac, D., Zorić, N., Gajović, A., Dubček, P., Bernstorf, S. & Čeh, M. (2010) GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films. Nuclear instruments & methods in physics research. Section B : Beam interactions with materials and atoms, 268 (3-4), 259-262 doi:10.1016/j.nimb.2009.09.046.
@article{article, year = {2010}, pages = {259-262}, DOI = {10.1016/j.nimb.2009.09.046}, keywords = {amorphous-nanocrytalline silicon, GISAXS, WAXS}, journal = {Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms}, doi = {10.1016/j.nimb.2009.09.046}, volume = {268}, number = {3-4}, issn = {0168-583X}, title = {GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films}, keyword = {amorphous-nanocrytalline silicon, GISAXS, WAXS} }
@article{article, year = {2010}, pages = {259-262}, DOI = {10.1016/j.nimb.2009.09.046}, keywords = {amorphous-nanocrytalline silicon, GISAXS, WAXS}, journal = {Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms}, doi = {10.1016/j.nimb.2009.09.046}, volume = {268}, number = {3-4}, issn = {0168-583X}, title = {GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films}, keyword = {amorphous-nanocrytalline silicon, GISAXS, WAXS} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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