Structural relaxation of amorphous Al-W thin films upon heating (CROSBI ID 474051)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija
Podaci o odgovornosti
Ivkov, Jovica ; Radić, Nikola ; Tonejc, Antun
engleski
Structural relaxation of amorphous Al-W thin films upon heating
The amorphous Al-W thin films exhibit a pronounced variation of electrical resistance due to structural relaxation at temperatures between 100°C and 500°C. The effects of substrate material, deposition temperature, and film thickness upon the magnitude of such variation were examined. Thin amorphous Al78W22 films were prepared by a co-sputtering technique onto alumina ceramic, sapphire, and glass substrates, held at four temperatures: LN2, RT, 200°C, and 400°C, respectively. A measure of structural relaxation was inferred from the variation of electric resistance during a cycle of isochronous heating up to 515°C, isothermal annealing at that temperature for 6 hrs, followed by cooling to room temperature. For the amorphous films deposited onto substrates at LN2 temperature, the degree of structural relaxation decreases in a sequence of alumina ceramic - glass - sapphire substrates, apparently related to the deposition surface roughness. Degree of relaxation also decreases with the increase of temperature at which the substrate was held during deposition. Since the relaxation was more pronounced in aluminum-rich alloys, the role of aluminum constituent was checked: a corresponding investigation on Al-Ti and Cu-Ti amorphous films showed that only the Al-containing alloys exhibit strong structural relaxation. This might be due to specific electronic structure of aluminum. As a conclusion, a reduced irreversible variation of the electric resistance of amorphous Al-W films upon heating up to about 500°C can be achieved only by a careful selection of alloy composition and preparation conditions.
amorphous thin films; Al-W alloys; structural relaxation
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Podaci o prilogu
28-28-x.
2000.
objavljeno
Podaci o matičnoj publikaciji
8th Joint Vacuum Conference of Croatia, Austria, Slovenia and Hungary, Finale programme and book of absracts
Milun, Milorad ; Zorc, Hrvoje
Zagreb: Hrvatsko Vakuumsko Društvo (HVD)
Podaci o skupu
8th joint vacuum conference of Croatia, Austria, Slovenia and Hungary
poster
04.06.2000-09.06.2000
Pula, Hrvatska