engleski

CHARACTERISATION OF CRATERS DURING GDOES PROFILING OF TiN AND TiAlN HARD COATINGS ON HSS STEEL

In this paper results of depth profile analysis of TiN and TiAlN coatings using GDOES technique are presented. The sputtering system CC800/7 was used for deposition of TiAlN and TiN hard coatings. As substrate we used polished plates of HSS tool steel. The composition of coatings was determined by the GDOES depth profiles and a spectrometer. The surface morphology of the coatings was examined by field emission scanning electron microscope, by 3D stylus profilometer and by atomic force microscope.

GDOES; depth profiling; surface analysis; SEM; AFM

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