engleski

Polysilicon-AlN heating element

Polysilicon heating elements represent a new and an advanced generation of heaters for application in industry, laboratory equipment, and domestic appliances. Polysilicon heater is a planar technology device based on a polysilicon layer resistor of a suitable shape with high temperature resistant contacts deposited on a base made of an electrical insulator with high thermal conductivity (aluminium-nitride ceramics). Eletrical current flows through resistor and generates heat. Through the base, generated heat is very effectively transferred to the heated load (medium or a plate) on the other side of the base plate. For the same temperature of the heated load, polysilicon heater has significantly smaller dimensions and lower operating temperature than the existing radiant heaters. Conductive heat transfer through the base plate can be highly directed and localised what results in very small heat losses. Large-series and low-priced production of polysilicon heaters is possible in existing semiconductor facilities.

heating element; polysilicon; AlN-ceramics; domestic appliances; power; power density; heat losses; thermal conduction; insulation

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