engleski

A Novel Polysilicon-AlN Heating Element

A novel polysilicon-AlN ceramics heating element is proposed. The structure of the element is analyzed and compared to conventional heating elements. Samples of the new structure were processed and evaluated. The new heating element is incorporated in the metal hotplate structure whose thermal properties are measured. Achieved plate temperatures of over 150 C and power densities of over 200 W/cmČ2 make the new heater suitable for a whole range of applications.

polysilicon; AlN ceramics; heating element

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