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Quantitative analysis of hydrogen in thin films using TOF ERDA spectroscopy


Siketić, Zdravko; Bogdanović Radović, Ivančica; Jakšić, Milko
Quantitative analysis of hydrogen in thin films using TOF ERDA spectroscopy // Thin solid films, 518 (2010), 10; 2617-2622 doi:10.1016/j.tsf.2009.07.196 (međunarodna recenzija, članak, znanstveni)


Naslov
Quantitative analysis of hydrogen in thin films using TOF ERDA spectroscopy

Autori
Siketić, Zdravko ; Bogdanović Radović, Ivančica ; Jakšić, Milko

Izvornik
Thin solid films (0040-6090) 518 (2010), 10; 2617-2622

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Hydrogen analysis ; TOF ERDA

Sažetak
Determination of atomic concentrations in thin films is one of key problems in materials science. Time-of-Flight Elastic Recoil Detection Analysis (TOF ERDA) is a powerful method for depth profiling of light and medium mass elements in near surface layers of material. However, due to poor detection efficiency those spectrometers are not commonly used for hydrogen analysis. We have performed some improvements in order to increase detection efficiency and to make spectrometer more suitable for hydrogen analysis. The spectrometer performance was tested on amorphous Si samples implanted with H- and D- and hydrogenised Si standard referent material. Sensitivity for hydrogen in silicon matrix was found to be several tenths of ppm with a surface depth resolution of ~15 nm.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
098-1191005-2876 - Procesi interakcije ionskih snopova i nanostrukture (Milko Jakšić, )

Ustanove
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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