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Three-dimensional imaging of carbon using an elastic scattering coincidence technique


Bogdanović Radović, Ivančica; Siketić, Zdravko; Skukan, Natko; Jakšić, Milko
Three-dimensional imaging of carbon using an elastic scattering coincidence technique // Journal of applied physics, 105 (2009), 7; 074901, 6 doi:10.1063/1.3100038 (međunarodna recenzija, članak, znanstveni)


Naslov
Three-dimensional imaging of carbon using an elastic scattering coincidence technique

Autori
Bogdanović Radović, Ivančica ; Siketić, Zdravko ; Skukan, Natko ; Jakšić, Milko

Izvornik
Journal of applied physics (0021-8979) 105 (2009), 7; 074901, 6

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Coincident scattering ; carbon

Sažetak
A setup is described for an elastic scattering coincidence technique installed at an ion microprobe facility. This setup is developed for three-dimensional (3D) profiling of light elements in thin transmission targets. In the present paper, 3D imaging of carbon is demonstrated. Recoiled carbon atoms together with carbon ions scattered from the target are detected in coincidence using particle detectors placed symmetrically around the beam direction at 45°. Capabilities of the technique concerning depth resolution and sensitivity have been tested on thin samples of known composition. 3D imaging of carbon in 2 µ m thick aluminum foil was achieved with a sensitivity for carbon of around 1 at.%, a depth resolution of 100 nm, and a lateral resolution of 2-3 micrometers.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
098-1191005-2876 - Procesi interakcije ionskih snopova i nanostrukture (Milko Jakšić, )

Ustanove
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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