Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy (CROSBI ID 543099)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Glavan, Nataša ; Krstulović, Nikša ; Kregar, Zlatko ; Milošević, Slobodan
engleski
Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy
Low-pressure inductively coupled oxygen plasma sustained within a linear glass tube was loaded by acetone vapours and characterized by means of the optical emission spectroscopy. Both spatial and temporal emission measurements were performed. Spectra consist mainly of the CO molecular bands which were used to characterize the plasma conditions. Spectral intensity of CO molecular band was studied versus partial acetone vapour and oxygen pressure.
RF aceton plasma ; optical emission spectroscopy
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Podaci o prilogu
235-238.
2008.
objavljeno
Podaci o matičnoj publikaciji
Midem Conference 2008 Proceedings
Amon, S ; Mozetič, M ; Šorli, I
Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM)
978-961-91023-8-1
Podaci o skupu
44th International Conference on Microelectronics, devices and materials at the Workshop on Advanced Plasma Technologies
poster
01.01.2008-01.01.2008
Portorož, Slovenija
