Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma (CROSBI ID 543097)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Kregar, Zlatko ; Glavan, Nataša ; Krstulović, Nikša ; Milošević, Slobodan
engleski
Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma
Inductively coupled RF plasma generated in a linear glass tube was studied by means of optical emission spectroscopy. Low pressure plasma of various gases (hydrogen and oxygen) and vapours (acetone-C3H5OH, water) was created by 8 turn coil with an EM field oscillating at 13.56 MHz. Their spectral intensities were spatially and temporally resolved and then analyzed.
RF plasma; optical emission spectroscopy
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Podaci o prilogu
219-222.
2008.
objavljeno
Podaci o matičnoj publikaciji
44th International Conference on Microelectronics, Devices and Materials and the Workshop on Advanced Plasma Technologies (Midem 2008) : Proceedings
Amon, S ; Mozetič, M ; Šorli, I
Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM)
978-961-91023-8-1
Podaci o skupu
International Conference on Microelectronics, Devices and Materials (44 ; 2008) ; Workshop on Advanced Plasma Technologies
poster
17.09.2008-19.09.2008
Portorož, Slovenija
