engleski

3D imaging of light elements using elastic scattering coincidence technique

We describe setup for elastic scattering coincidence technique at the Zagreb microprobe. It is developed for 3-dimensional profiling of small concentration of light elements in heavier matrices. The method is based on the elastic scattering coincidence technique. Recoiled atoms as well as ions scattered from the target are detected in coincidence by solid state detectors subtending large solid angles and placed symmetrically around the beam direction at 45°. Method is already well established at several microbeam facilities for the p-p elastic scattering with incident proton energies varying from 2.5 MeV up to 20 MeV. In this work we applied the method for some other symmetrical systems. Since scattering products are detected in forward direction, method can be used only for transmission samples with thickness in the range of micrometers, depending on the ion type, its energy and sample matrix. Quantification was performed using normalization to complete forward scattering spectrum. By using IEE ERDA system for that purpose, additional 3D hydrogen distribution was measured as well. Capabilities of the technique concerning depth resolution and sensitivity have been tested on several thin samples of known composition. A method is also compared with other IBA techniques suitable for microbeam irradiation.

3D imaging; light elements; Coincidence scattering

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