engleski

Investigation of sputter craters after gdoes analysis of TiCN coatings

The investigated TiCN coatings were deposited on a chromium-mollybdenium-vanadium alloyed tool steel Sleipner of Uddeholm Company by cathode arc evaporation technique (BAI 1200) in Balzers Hard Coating Center (Kapfenberg, Austria). In this work the depth profiling method glow discharge optical emission spectrometry (GDOES) is used for determining the thickness of TiCN coating after determining the sputtering rate. GDOES is a rapid depth profiling technique, this analysis is destructive and there is a formation of sputter craters on the sample surface. The obtained data were compared with the thickness values obtained from the SEM fracture cross-sections. Structure of sputter craters after GDOES experiment at different coating depths as well as the coating surface were evaluated by the scanning electron microscopy (SEM), 3D profilometer and atomic force microscopy (AFM). The chemical composition of the coating was determined by the EDS method.

PVD ; TiCN coatings ; sputter craters

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