Napredna pretraga

Pregled bibliografske jedinice broj: 349134

Low temperature resistivity of heavily boron doped LPCVD polysilicon thin films


Žonja, Sanja; Očko, Miroslav; Ivanda, Mile; Biljanović, Petar
Low temperature resistivity of heavily boron doped LPCVD polysilicon thin films // Journal of physics. D, Applied physics, 41 (2008), 16; 162002-1 (međunarodna recenzija, članak, znanstveni)


Naslov
Low temperature resistivity of heavily boron doped LPCVD polysilicon thin films

Autori
Žonja, Sanja ; Očko, Miroslav ; Ivanda, Mile ; Biljanović, Petar

Izvornik
Journal of physics. D, Applied physics (0022-3727) 41 (2008), 16; 162002-1

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Low temperature resistivity; heavily boron doped polycrystalline silicon thin films

Sažetak
Heavily boron delta-doped polysilicon samples were prepared by horizontal low-pressure chemical vapor deposition (LPCDV) at 750◦ C for 1h and were annealed at 1200◦ C for 1h. In this way, the samples with low sheet resistance down to 8.9Ω /sq were obtained. The resistivity was measured from room temperature down to 2K. A T1/2 dependence of the conductivity in an unusually wide temperature interval, even up to 80K was observed. Above 140K, the resistivity can be described by the T3/2 dependence. The experimental results were analyzed within the theories for the disordered metals and compared with the corresponding existing resistivity data.

Izvorni jezik
Engleski

Znanstvena područja
Fizika, Elektrotehnika



POVEZANOST RADA


Projekt / tema
035-0352827-2841 - Materijali sa elektronskom strukturom modeliranom modernim tehnikama priprave (Ivica Aviani, )
036-0982904-1642 - Sofisticirane poluvodičke strukture za komunikacijsku tehnologiju (Marko Koričić, )
098-0982904-2898 - Fizika i primjena nanostruktura i volumne tvari (Mile Ivanda, )

Ustanove
Institut za fiziku, Zagreb,
Fakultet elektrotehnike i računarstva, Zagreb,
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus