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Characterisation of molecular nitrogen in III-V compound semiconductors by near-edge X-ray absorption fine structure and photoemission spectroscopies (CROSBI ID 140557)

Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija

Božanić, Ana ; Majlinger, Zlatko ; Petravić, Mladen ; Gao, Q. ; Llewellyn, D. ; Crotti, C. ; Yang, Y.-W. Characterisation of molecular nitrogen in III-V compound semiconductors by near-edge X-ray absorption fine structure and photoemission spectroscopies // Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 26 (2008), 4; 592-596

Podaci o odgovornosti

Božanić, Ana ; Majlinger, Zlatko ; Petravić, Mladen ; Gao, Q. ; Llewellyn, D. ; Crotti, C. ; Yang, Y.-W.

engleski

Characterisation of molecular nitrogen in III-V compound semiconductors by near-edge X-ray absorption fine structure and photoemission spectroscopies

Formation of molecular nitrogen under low-energy nitrogen bombardment of III-V compound semiconductor surfaces has been studied by photoemission spectroscopy around N 1s core- level and near-edge X-ray absorption fine structure (NEXAFS) around N K-edge. Interstitial molecular nitrogen, N2, has been formed in all samples under consideration. The presence of N2 produces a sharp resonance in low-resolution NEXAFS spectra, showing the characteristic vibrational fine structure in high- resolution measurements, and, at the same time, a new peak, shifted towards higher binding energies for several eV, in all N 1s photoemission spectra.

NEXAFS; nitrogen defects; core-level photoemission; ion-beam nitridation; thin-films; gan; surfaces; implantation; bombardment; defects; growth

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Podaci o izdanju

26 (4)

2008.

592-596

objavljeno

1071-1023

Povezanost rada

Fizika

Indeksiranost