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Interaction of Oxygen Plasma with Aluminium Substrates


Mozetič, Miran; Cvelbar, Uroš; Vesel, Alenka; Krstulović, Nikša; Milošević, Slobodan
Interaction of Oxygen Plasma with Aluminium Substrates // IEEE Transactions on Plasma Science, 36 (2008), 4; 868-869 doi:10.1109/TPS.2008.925383 (međunarodna recenzija, članak, znanstveni)


Naslov
Interaction of Oxygen Plasma with Aluminium Substrates

Autori
Mozetič, Miran ; Cvelbar, Uroš ; Vesel, Alenka ; Krstulović, Nikša ; Milošević, Slobodan

Izvornik
IEEE Transactions on Plasma Science (0093-3813) 36 (2008), 4; 868-869

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Inductively coupled plasma; oxygen plasma; aluminium; optical emission spectroscopy

Sažetak
Inductively coupled oxygen plasma are widely used for materials processing. Optical emission spectroscopy (OES) using fast miniature fiber spectrometer was used for plasma characterization and process monitoring. Images of plasma and accompanying spectra during interaction with aluminium foil are presented.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Slobodan Milošević, )

Ustanove
Institut za fiziku, Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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