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Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy


Kregar, Zlatko; Krstulović, Nikša; Milošević, Slobodan; Kenda, Klemen; Cvelbar, Uroš; Mozetič, Miran
Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy // IEEE Transactions on Plasma Science, 36 (2008), 4; 1368-1369 doi:10.1109/TPS.2008.920896 (međunarodna recenzija, članak, znanstveni)


Naslov
Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy

Autori
Kregar, Zlatko ; Krstulović, Nikša ; Milošević, Slobodan ; Kenda, Klemen ; Cvelbar, Uroš ; Mozetič, Miran

Izvornik
IEEE Transactions on Plasma Science (0093-3813) 36 (2008), 4; 1368-1369

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Oxygen plasma; optical emission spectroscopy

Sažetak
Inductively coupled RF oxygen plasma generated by inductive coil wrapped around a linear glass tube is studied. Images of plasma properties in the linear reactor are presented. Plasma diagnostics was performed by spatially resolved optical emission spectroscopy

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Slobodan Milošević, )

Ustanove
Institut za fiziku, Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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