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Pregled bibliografske jedinice broj: 319251

GISAXS studies of structural modifications in ion-beam amorphized Ge


Desnica-Franković, Ida Dunja; Dubček, Pavo; Desnica, Uroš; Bernstorff, Sigird; Ridgway, Marc; Glover, C. J.
GISAXS studies of structural modifications in ion-beam amorphized Ge // Nuclear Instruments and Methods in Physics Research. B, 249 (2006), 114-117 (međunarodna recenzija, članak, znanstveni)


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Naslov
GISAXS studies of structural modifications in ion-beam amorphized Ge

Autori
Desnica-Franković, Ida Dunja ; Dubček, Pavo ; Desnica, Uroš ; Bernstorff, Sigird ; Ridgway, Marc ; Glover, C. J.

Izvornik
Nuclear Instruments and Methods in Physics Research. B (0168-583X) 249 (2006); 114-117

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
amorphous Ge; ion implantation; GISAXS; nano-voids; porosity

Sažetak
Grazing incidence small angle scattering of X-rays (GISAXS) was used to analyze structural modifications in implantation-damaged Ge. Samples were implanted by different doses of 74Ge, from 3 × 1012 cm− 2 to 3 × 1016 cm− 2 ; at room- or liquid nitrogen-temperature, respectively. We have found that the micro-structure in amorphous Ge, continuously and consistently evolves as a function of ion dose but differs according to the implantation temperature. In RT-samples small vacancy nanoclusters agglomerate in the end-of-range region of implanted layer even before complete amorphization. With higher doses nanoclusters increase and coalesce into nano-voids. For the highest dose, the onset of porosity is confirmed. On the other hand, in LN-implanted samples, the clustering-related signal is much weaker and evolves more slowly

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekti:
0098020

Ustanove:
Institut "Ruđer Bošković", Zagreb

Profili:

Avatar Url Pavo Dubček (autor)

Avatar Url Uroš Desnica (autor)

Avatar Url Ida-Dunja Desnica (autor)

Citiraj ovu publikaciju

Desnica-Franković, Ida Dunja; Dubček, Pavo; Desnica, Uroš; Bernstorff, Sigird; Ridgway, Marc; Glover, C. J.
GISAXS studies of structural modifications in ion-beam amorphized Ge // Nuclear Instruments and Methods in Physics Research. B, 249 (2006), 114-117 (međunarodna recenzija, članak, znanstveni)
Desnica-Franković, I., Dubček, P., Desnica, U., Bernstorff, S., Ridgway, M. & Glover, C. (2006) GISAXS studies of structural modifications in ion-beam amorphized Ge. Nuclear Instruments and Methods in Physics Research. B, 249, 114-117.
@article{article, year = {2006}, pages = {114-117}, keywords = {amorphous Ge, ion implantation, GISAXS, nano-voids, porosity}, journal = {Nuclear Instruments and Methods in Physics Research. B}, volume = {249}, issn = {0168-583X}, title = {GISAXS studies of structural modifications in ion-beam amorphized Ge}, keyword = {amorphous Ge, ion implantation, GISAXS, nano-voids, porosity} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus





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