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The preparation of thin silica layers by wet thermal oxidation


Gebavi, Hrvoje; Ivanda, Mile; Hršak, Damir; Ristić, Davor; Furić, Krešimir; Musić, Svetozar; Ristić, Mira; Žonja, Sanja; Biljanović, Petar; Gamulin, Ozren et al.
The preparation of thin silica layers by wet thermal oxidation // Proceedings of the VIIth International Conference Preparation of ceramic materials / Plešingerova, Beatrice ; Kuffa, Tarzicius (ur.).
Košice: Technical University of Košice, 2007. str. 105-107 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)


Naslov
The preparation of thin silica layers by wet thermal oxidation

Autori
Gebavi, Hrvoje ; Ivanda, Mile ; Hršak, Damir ; Ristić, Davor ; Furić, Krešimir ; Musić, Svetozar ; Ristić, Mira ; Žonja, Sanja ; Biljanović, Petar ; Gamulin, Ozren ; Balarin, Maja ; Montagna, M. ; Ferarri, M. ; Righini, G.C.

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
Proceedings of the VIIth International Conference Preparation of ceramic materials / Plešingerova, Beatrice ; Kuffa, Tarzicius - Košice : Technical University of Košice, 2007, 105-107

ISBN
978-80-8073-806-8

Skup
International Conference Preparation of ceramic materials (7 ; 2007)

Mjesto i datum
Košice, Slovačka, 18.-20.07.2007

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Silica layer; wet thermal oxidation; silicon

Sažetak
The preparation of thin silica layers was done by wet thermal oxidation of silicon in diffusion furnace. Reaction temperature was 1141 °C. The silicon wafer of 5.08 cm in diameter, 280 μ m thicknesses, 111 orientations, n-doped with P has been used as precursor. Thickness of produced layer was 72 - 108 μ m. The base of diffusion furnace was a quartz tube placed in a spiral heater. The flow rate of vapor was constant. Reaction time was varied between 5 and 40 minutes. It was found that there are strong correlation between layer thickness and reaction time. Experimental data confirm theoretical model. When reaction time is longer then 20 minutes experimental data are almost same as theoretical model but there are small deviations at lower temperatures because of thermalization time.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
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Ustanove
Fakultet elektrotehnike i računarstva, Zagreb,
Institut "Ruđer Bošković", Zagreb,
Medicinski fakultet, Zagreb,
Metalurški fakultet, Sisak