Requirements and possibilities of micro and nano metrology (CROSBI ID 528828)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Mahović, Sanjin ; Udiljak, Toma ; Ciglar, Damir
engleski
Requirements and possibilities of micro and nano metrology
The demands for micro- and nanometrology result primarily from the development of micro and nano technologies for the industrial areas of precision engineering, micro and nano electronics and optoelectronics, molecular technology, etc. In this work, the possibilities of micro and nano metrology of lengths in the field of precision engineering will be presented, reflected in the development of precise and ultra-precise treatments as consequence of increased requirements for miniaturization of products and the complexity of forms, and by narrowing the limits of allowed deviations with the increased requirements on the surface quality. The response from the aspect of metrology is the development of new methods and instruments whose capabilities, advantages and limitations are presented in this paper with special focus on the problem of insuring traceability and calibration. Since the Laboratory for precise measurement of length at the Faculty of Mechanical Engineering and Naval Architecture has been carrying out for a number of years intensive research in the area of micro and nano metrology in the development of measuring methods and ensuring traceability and calibration, the paper will present the results obtained at the Laboratory.
length ; micrometrology ; nanometrology
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Podaci o prilogu
17-26.
2007.
objavljeno
Podaci o matičnoj publikaciji
11th International scientific conference on production engineering (CIM 2007) Computer Integrated Manufacturing and High Speed Machining : proceedings
Abele, Eberhard ; Udiljak, Toma ; Ciglar, Damir
Zagreb: Hrvatska udruga proizvodnog strojarstva (HUPS)
978-953-97181-9-8
Podaci o skupu
International scientific conference on production engineering (11 ; 2007)
pozvano predavanje
13.06.2007-17.06.2007
Biograd na Moru, Hrvatska