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Pregled bibliografske jedinice broj: 299385

Microstructural properties of DC magnetron sputtered a-Si:H by IR spectroscopy


Gracin, Davor; Desnica, Uroš; Ivanda, Mile
Microstructural properties of DC magnetron sputtered a-Si:H by IR spectroscopy // Journal of Non-Crystalline Solids, 149 (1992), 3; 257-263 doi:10.1016/0022-3093(92)90074-T (međunarodna recenzija, članak, znanstveni)


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Naslov
Microstructural properties of DC magnetron sputtered a-Si:H by IR spectroscopy

Autori
Gracin, Davor ; Desnica, Uroš ; Ivanda, Mile

Izvornik
Journal of Non-Crystalline Solids (0022-3093) 149 (1992), 3; 257-263

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
amorphous silicon ; magnetron sputtering ; IR spectroscopy

Sažetak
The amorphous hydrogenated silicon thin films, deposited by DC magnetron sputtering, were examined by near infrared and Fourier transformation infra red spectroscopy. It was found that, by increase of hydrogen concentration from 6 to 32 at %, the dielectric constant decreases and the frequency of absorption peak, corresoinding to stretching vibrations of Si-H bonds, increases. The results were analyzed within the framework of effective medium approach assuming medium composed of Si network and voids decorated with hydrogen atoms. It is concluded that the increase of the hydrogen content is accompanied by increase of void fraction in the total volume, with an increase of "decoration" with hydrogen and also with increased contribution of larger voids. The obtained dependence upon hydrogen concentration agrees well with density measurements and predictions made based on muliple-quantum nuclear magnetic resonance spectroscopy.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekti:
1-03-066

Ustanove:
Institut "Ruđer Bošković", Zagreb

Profili:

Avatar Url Mile Ivanda (autor)

Avatar Url Davor Gracin (autor)

Avatar Url Uroš Desnica (autor)

Citiraj ovu publikaciju

Gracin, Davor; Desnica, Uroš; Ivanda, Mile
Microstructural properties of DC magnetron sputtered a-Si:H by IR spectroscopy // Journal of Non-Crystalline Solids, 149 (1992), 3; 257-263 doi:10.1016/0022-3093(92)90074-T (međunarodna recenzija, članak, znanstveni)
Gracin, D., Desnica, U. & Ivanda, M. (1992) Microstructural properties of DC magnetron sputtered a-Si:H by IR spectroscopy. Journal of Non-Crystalline Solids, 149 (3), 257-263 doi:10.1016/0022-3093(92)90074-T.
@article{article, year = {1992}, pages = {257-263}, DOI = {10.1016/0022-3093(92)90074-T}, keywords = {amorphous silicon, magnetron sputtering, IR spectroscopy}, journal = {Journal of Non-Crystalline Solids}, doi = {10.1016/0022-3093(92)90074-T}, volume = {149}, number = {3}, issn = {0022-3093}, title = {Microstructural properties of DC magnetron sputtered a-Si:H by IR spectroscopy}, keyword = {amorphous silicon, magnetron sputtering, IR spectroscopy} }
@article{article, year = {1992}, pages = {257-263}, DOI = {10.1016/0022-3093(92)90074-T}, keywords = {amorphous silicon, magnetron sputtering, IR spectroscopy}, journal = {Journal of Non-Crystalline Solids}, doi = {10.1016/0022-3093(92)90074-T}, volume = {149}, number = {3}, issn = {0022-3093}, title = {Microstructural properties of DC magnetron sputtered a-Si:H by IR spectroscopy}, keyword = {amorphous silicon, magnetron sputtering, IR spectroscopy} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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