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IR and Raman study of Si_(1-x)C_x:H amorphous thin films (CROSBI ID 132390)
Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija
Lugomer, Stjepan ; Ivanda, Mile ; Gracin, Davor ; Furić, Krešimir ; Maksimović, Aleksandar
IR and Raman study of Si_(1-x)C_x:H amorphous thin films // Journal of molecular structure, 267 (1992), 347-351
Podaci o odgovornosti
Lugomer, Stjepan ; Ivanda, Mile ; Gracin, Davor ; Furić, Krešimir ; Maksimović, Aleksandar
engleski
IR and Raman study of Si_(1-x)C_x:H amorphous thin films
Amorphous hydrogenated a-Si_(1-x)C_x:H thin films have been obtained by means of DC magnetron sputtering in the benzene vapour. Comparative IR and Raman spectroscopy study of carbon incorporation in the silicon matrix have been performed. It was found that carbon incorporates in the form of the CH_3-groups, individual C-atoms and the C_6H_6 molecules.
infrared specroscopy ; Raman ; amorphous silicon carbide
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