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IR and Raman study of Si_(1-x)C_x:H amorphous thin films


Lugomer, Stjepan; Ivanda, Mile; Gracin, Davor; Furić, Krešimir; Maksimović, Aleksandar
IR and Raman study of Si_(1-x)C_x:H amorphous thin films // Journal of Molecular Structure, 267 (1992), 347-351 (međunarodna recenzija, članak, znanstveni)


Naslov
IR and Raman study of Si_(1-x)C_x:H amorphous thin films

Autori
Lugomer, Stjepan ; Ivanda, Mile ; Gracin, Davor ; Furić, Krešimir ; Maksimović, Aleksandar

Izvornik
Journal of Molecular Structure (0022-2860) 267 (1992); 347-351

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Infrared specroscopy; Raman; amorphous silicon carbide

Sažetak
Amorphous hydrogenated a-Si_(1-x)C_x:H thin films have been obtained by means of DC magnetron sputtering in the benzene vapour. Comparative IR and Raman spectroscopy study of carbon incorporation in the silicon matrix have been performed. It was found that carbon incorporates in the form of the CH_3-groups, individual C-atoms and the C_6H_6 molecules.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
1-03-066

Ustanove
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus