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Pregled bibliografske jedinice broj: 287338

Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements


Janicki, Vesna; Sancho Parramon, Jordi; Stenzel, Olaf; Lappschies, Marc; Görtz, Björn; Rickers, Christoph; Polenzky, Christina; Richter, Uwe
Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements // Applied optics (2004), 46 (2007), 24; 6084-6091 doi:10.1364/AO.46.006084 (međunarodna recenzija, članak, znanstveni)


Naslov
Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements

Autori
Janicki, Vesna ; Sancho Parramon, Jordi ; Stenzel, Olaf ; Lappschies, Marc ; Görtz, Björn ; Rickers, Christoph ; Polenzky, Christina ; Richter, Uwe

Izvornik
Applied optics (2004) (1559-128X) 46 (2007), 24; 6084-6091

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Antireflective coating; optical characterisation; hybrid coating; reverse engineering; variable angle spectroscopic ellipsometry

Sažetak
A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analysed by optical characterisation based on spectrophotometric and spectroscopic ellipsometric measurements under different angles of incidence in order to precisely characterise the coatings. The Lorentz-Lorenz model has been used for calculation of refractive index of material mixtures in gradient index layers as well as some homogenous parts of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
0098140

Ustanove
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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