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TUNGSTEN MULTILAYERS (CROSBI ID 759367)
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Radić, Nikola ; Dubček, Pavo ; Bernstorff, Sigrid ; Salamon, Krešimir
TUNGSTEN MULTILAYERS // IBR Elettra Annual Report 2004 Austro SAXS. 2005.
Podaci o odgovornosti
Radić, Nikola ; Dubček, Pavo ; Bernstorff, Sigrid ; Salamon, Krešimir
engleski
TUNGSTEN MULTILAYERS
Superior properties of tungsten makes it suitable for gate contacts and interconnects in ULSI/ VLSI devices, diffusion barriers in Al-W based technology, absorption layer for masks in x-ray lithography, and alternating layers in X-ray mirrors.
Tungsten; multilayers; X-ray reflectivity
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Podaci o izdanju
IBR Elettra Annual Report 2004 Austro SAXS
2005.
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