Quantitative Analysis of a-Si1 x Cx:H Thin Films (CROSBI ID 470038)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija
Podaci o odgovornosti
Gracin, Davor ; Jakšić, Milko ; Yang, C. ; Borjanović, Vesna ; Praček, Borut
engleski
Quantitative Analysis of a-Si1 x Cx:H Thin Films
The amorphous hydrogenated silicon carbide thin films (a-Si1-x - Cx:H) were deposited by magnetron sputtering source onto the glass and mono-crystalline substrate. The spatial resolution of applied methods and the reliability in determination of total concentration of silicon, carbon, hydrogen and oxygen is discussed.
Silicon-carbide; ERD and RBS analyses
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Podaci o prilogu
55-x.
1998.
objavljeno
Podaci o matičnoj publikaciji
Abstract Book
Phil Woodruff
IUVSTA
Podaci o skupu
14th International Vacuum Congress (IVC-14)
predavanje
31.08.1998-04.09.1998
Birmingham, Ujedinjeno Kraljevstvo
